Optical Instruments, Volume. 45, Issue 5, 79(2023)
The chip of temperature sensor based on spatial optical coupling system
A silicon photonic chip space coupling system is studied, which simplifies the coupling mode of integrated photonic chip with optical fiber array, Through the spatial optical system, the light in the band near 1550 nm is vertically coupled into the integrated photonic chip through the grating coupler, and the optical sensing is realized through the waveguide and microring resonator. The multi-mode optical fiber is used to collect the emerging energy and carry out the temperature sensing test. The experimental results show that the transmission lines of the through-end ring resonator with frree spectral range(FSR) of 0.85 nm and Q value of 16321 are obtained by wavelength detection. In temperature sensing tests, the sensitivity reached 127 pm/℃. The results show that there is only a difference between spatial optical coupling and optical fiber array optical coupling in insertion loss, and the coupling system can get better temperature sensing test results. Spatial optical coupling has the advantages of convenient replacement of sensor chip and easy to multi-channel testing.
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Zhe ZHANG, Mingyu LI, Zehua XIAO, Lun PAN, Sheng BAO, Zhiping YANG, Qiushun LI. The chip of temperature sensor based on spatial optical coupling system[J]. Optical Instruments, 2023, 45(5): 79
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Received: Jan. 15, 2023
Accepted: --
Published Online: Dec. 27, 2023
The Author Email: LI Mingyu (limingyu@cust.edu.cn)