Infrared and Laser Engineering, Volume. 53, Issue 11, 20240435(2024)

Research on femtosecond laser micro-nano machining in the field of microrobot (invited)

Wenwen YANG1, Guoqi ZHU2, Zhengjie GUAN1, Yilei XU1, Shengying FAN1、*, Wei CHENG1, and Jincheng NI3
Author Affiliations
  • 1Laser Institute , Shandong Academy of Sciences,OILU University of Technology (Shandong Academy of Sciences), Jinan 250104, China
  • 2Zibo Core Integrated Circuit Co., Ltd., Zibo 255000, China
  • 3Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230027, China
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    References(58)

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    Wenwen YANG, Guoqi ZHU, Zhengjie GUAN, Yilei XU, Shengying FAN, Wei CHENG, Jincheng NI. Research on femtosecond laser micro-nano machining in the field of microrobot (invited)[J]. Infrared and Laser Engineering, 2024, 53(11): 20240435

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    Paper Information

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    Received: Sep. 25, 2024

    Accepted: --

    Published Online: Dec. 13, 2024

    The Author Email: FAN Shengying (fanshengying2022@163.com)

    DOI:10.3788/IRLA20240435

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