High-throughput fabrication of large-scale metasurfaces using electron-beam lithography with SU-8 gratings for multilevel security printing

You Sin Tan; Hao Wang; Hongtao Wang; Chengfeng Pan; Joel K. W. Yang

doi:10.1364/PRJ.472212

Photonics Research, Volume. 11, Issue 3, B103(2023)

High-throughput fabrication of large-scale metasurfaces using electron-beam lithography with SU-8 gratings for multilevel security printing Spotlight on Optics

You Sin Tan¹, Hao Wang^1,3、*, Hongtao Wang¹, Chengfeng Pan¹, and Joel K. W. Yang^1,2,4、*

Author Affiliations

¹Singapore University of Technology and Design, 487372 Singapore, Singapore

²Institute of Materials Research and Engineering, A*STAR (Agency for Science, Technology and Research), 138634 Singapore, Singapore

³e-mail: hao_wang@sutd.edu.sg

⁴e-mail: joel_yang@sutd.edu.sg

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You Sin Tan, Hao Wang, Hongtao Wang, Chengfeng Pan, Joel K. W. Yang. High-throughput fabrication of large-scale metasurfaces using electron-beam lithography with SU-8 gratings for multilevel security printing[J]. Photonics Research, 2023, 11(3): B103

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Paper Information

Special Issue: OPTICAL METASURFACES: FUNDAMENTALS AND APPLICATIONS

Received: Aug. 8, 2022

Accepted: Nov. 9, 2022

Published Online: Feb. 24, 2023

The Author Email: Hao Wang (hao_wang@sutd.edu.sg), Joel K. W. Yang (joel_yang@sutd.edu.sg)

DOI:10.1364/PRJ.472212

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology