Laser & Optoelectronics Progress, Volume. 58, Issue 8, 0815006(2021)
Development of Visual Size-Measurement System for Micro-Optical Components
Figures & Tables(16)
Fig. 2. Comparison of components before and after illumination compensation. (a) Before illumination compensation; (b) after illumination compensation
Fig. 3. Edge extraction of optical element. (a) Original image; (b) Otsu threshold segmentation; (c) edge expansion; (d) edge corrosion; (e) region segmentation
Fig. 6. Calibration plate and calibration lines. (a) Calibration plate; (b) vertical calibration line; (c) horizontal calibration line
Table 1. Calibration line spacing
View tableTable 1. Calibration line spacing
Item Vertical calibration line spacing/mm Horizontal calibration line spacing/mm 1 1.9211 1.7527 2 1.9205 1.7494 3 1.9232 1.7491 4 1.9214 1.7551 5 1.9233 1.7531 Mean value 1.9219 1.7519
Table 2. Measurement results of optical components for size
View tableTable 2. Measurement results of optical components for size
Item Otsu method Canny operator edge detection algorithm Otsu algorithm based on region segmentation Length /mm Width /mm Length /mm Width /mm Length /mm Width /mm 1 1.4599 1.4559 1.4891 1.4782 1.4638 1.4550 2 1.4872 1.4603 1.6697 1.4977 1.4639 1.4516 3 1.4601 1.4578 1.4868 1.4855 1.4656 1.4617 4 1.4597 1.1703 1.4868 1.4778 1.4611 1.4575 5 1.4601 1.4562 1.4860 1.4783 1.4618 1.4516 6 1.4567 1.4526 1.4821 1.4750 1.4628 1.4595 7 1.4582 1.4445 1.6530 1.4783 1.4648 1.4546 8 1.4571 1.0586 1.4818 1.4567 1.4642 1.4585 9 1.4573 1.4540 1.4827 1.4673 1.4616 1.4590 10 1.4572 1.4544 1.4915 1.4815 1.4633 1.4581
Table 3. Results of measuring size for optical components obtained by digital length gauge
View tableTable 3. Results of measuring size for optical components obtained by digital length gauge
Item Length/mm Width/mm 1 1.4635 1.4606 2 1.4630 1.4608 3 1.4633 1.4586 4 1.4614 1.4599 5 1.4605 1.4606 Mean value 1.4623 1.4601
Table 4. Error analysis for measuring size of machine vision
View tableTable 4. Error analysis for measuring size of machine vision
Item Otsu method Canny operator edge detection algorithm Otsu algorithm based on region segmentation Length Width Length Width Length Width Absolute error/ μm Relative error/ % Absolute error/ μm Relative error/ % Absolute error/ μm Relative error/ % Absolute error/ μm Relative error/ % Absolute error/ μm Relative error/ % Absolute error/ μm Relative error/ % 1 -2.4 -0.16 -4.2 -0.29 26.8 1.83 18.1 1.24 1.5 0.10 -5.1 -0.35 2 24.9 1.70 0.2 0.01 207.4 14.18 19.8 1.36 1.6 0.11 -8.5 -0.58 3 -2.2 -0.15 -2.3 -0.16 24.5 1.68 25.4 1.74 3.3 0.23 1.6 0.11 4 -2.6 -0.18 -289.8 -19.85 24.5 1.68 17.7 1.21 -1.2 -0.08 -2.6 -0.18 5 -2.2 -0.15 -3.9 -0.27 23.7 1.62 18.2 1.25 -0.5 -0.03 -8.5 -0.58 6 -5.6 -0.38 -7.5 -0.51 19.8 1.35 14.9 1.02 0.5 0.03 -0.6 -0.04 7 -4.1 -0.28 -15.6 -1.07 190.7 13.04 18.2 1.25 2.5 0.17 -5.5 -0.38 8 -5.2 -0.36 -401.5 -27.50 19.5 1.33 -3.4 -0.23 1.9 0.13 -1.6 -0.11 9 -5.0 -0.34 -6.1 -0.42 20.4 1.40 7.2 0.49 -0.7 -0.05 -1.1 -0.08 10 -5.1 -0.35 -5.7 -0.39 29.2 2.00 24.1 1.47 1.0 0.07 -2.0 -0.14
Table 5. Results for measuring the size of two kinds of optical elements using digital length gauge
View tableTable 5. Results for measuring the size of two kinds of optical elements using digital length gauge
Item Filter 1 Filter 2 Length/mm Width/mm Length/mm Width/mm 1 1.3974 1.0005 1.4003 0.7491 2 1.3964 0.9992 1.3996 0.7475 3 1.3969 1.0008 1.3944 0.7488 4 1.3992 1.0017 1.3986 0.7486 5 1.4069 1.0009 1.4001 0.7505 Mean value 1.3994 1.0006 1.3986 0.7489
Table 6. Measurement results and error analysis of component size
View tableTable 6. Measurement results and error analysis of component size
Item Filter 1 Filter 2 Length Width Length Width Measured size/ mm Absolute error / μm Relative error/ % Measured size / mm Absolute error / μm Relative error/ % Measured size / mm Absolute error / μm Relative error/ % Measured size / mm Absolute error / μm Relative error/ % 1 1.3906 -8.8 -0.63 1.0032 2.8 0.28 1.3908 -7.8 -0.56 0.7452 -3.7 -0.49 2 1.3941 -5.3 -0.38 1.0027 2.3 0.23 1.3902 -8.4 -0.60 0.7445 -4.4 -0.59 3 1.3940 -5.4 -0.39 1.0054 5.0 0.50 1.4018 3.2 0.23 0.7432 -5.7 -0.76 4 1.3929 -6.5 -0.46 1.0031 2.7 0.27 1.4072 8.6 0.61 0.7500 1.1 0.15 5 1.4025 3.1 0.22 1.0065 6.1 0.61 1.4079 9.3 0.66 0.7487 -0.2 -0.03
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Meidan Zhao, Guiying Yu, Yongshun Qu, Ruijie Lin, Min Lin. Development of Visual Size-Measurement System for Micro-Optical Components[J]. Laser & Optoelectronics Progress, 2021, 58(8): 0815006
Paper Information
Category: Machine Vision
Received: Sep. 10, 2020
Accepted: Sep. 22, 2020
Published Online: Apr. 16, 2021
The Author Email: Lin Min (1143692784@qq.com)
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