Optics and Precision Engineering, Volume. 27, Issue 3, 584(2019)

Realization of complex patterns via “sketch and peel” lithography

DUAN Hui-gao1,*... DAI Peng2, ZHANG Shi1, CHEN Yi-qin1, SHI Hui-min2, LIN Zi-hao2 and ZHOU Yan-ming2 |Show fewer author(s)
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    DUAN Hui-gao, DAI Peng, ZHANG Shi, CHEN Yi-qin, SHI Hui-min, LIN Zi-hao, ZHOU Yan-ming. Realization of complex patterns via “sketch and peel” lithography[J]. Optics and Precision Engineering, 2019, 27(3): 584

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    Paper Information

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    Received: Oct. 9, 2018

    Accepted: --

    Published Online: May. 30, 2019

    The Author Email: Hui-gao DUAN (duanhg@hnu.edu.cn)

    DOI:10.3788/ope.20192703.0584

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