Optics and Precision Engineering, Volume. 27, Issue 3, 584(2019)

Realization of complex patterns via “sketch and peel” lithography

DUAN Hui-gao1,*... DAI Peng2, ZHANG Shi1, CHEN Yi-qin1, SHI Hui-min2, LIN Zi-hao2 and ZHOU Yan-ming2 |Show fewer author(s)
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  • 2[in Chinese]
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    "Sketch and Peel" lithography (SPL) has demonstrated the potential to improve the efficiency of electron beam direct writing. However, it is time-consuming to design exposure layouts for complex patterns. In this study, we proposed a method to generate SPL layouts for complex patterns using an edge tracing algorithm to extract digital image contours. First, the color image was converted to a binary image by image graying and the Otsu adaptive threshold segmentation algorithm. Then, the boundary of the binary image was traced by the MATLAB bwboundaries function. Finally, the MATLAB GDS toolbox was utilized to transform the traced boundary to layouts for exposure. The experiments confirmed that the proposed method is effective for extracting the boundaries of images and converting them to layouts. As shown by fabricating a maple leaf-like pattern, the generated layout still maintains its high graphic fidelity when applied to SPL. The versatility of the proposed method for micro-nanomanufacturing was also verified by fabricating other complex patterns of different sizes and different geometries.

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    DUAN Hui-gao, DAI Peng, ZHANG Shi, CHEN Yi-qin, SHI Hui-min, LIN Zi-hao, ZHOU Yan-ming. Realization of complex patterns via “sketch and peel” lithography[J]. Optics and Precision Engineering, 2019, 27(3): 584

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    Paper Information

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    Received: Oct. 9, 2018

    Accepted: --

    Published Online: May. 30, 2019

    The Author Email: Hui-gao DUAN (duanhg@hnu.edu.cn)

    DOI:10.3788/ope.20192703.0584

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