International Journal of Extreme Manufacturing, Volume. 5, Issue 2, 22008(2023)

Atomic layer deposition to heterostructures for application in gas sensors

[in Chinese]1... [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1,* and [in Chinese]2 |Show fewer author(s)
Author Affiliations
  • 1College of Physics, Qingdao University, Qingdao 266071, People’s Republic of China
  • 2Institut für Chemie and IRIS Adlershof, Humboldt-Universitat zu Berlin, Brook-Taylor-Str. 2, 12489 Berlin, Germany
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Atomic layer deposition to heterostructures for application in gas sensors[J]. International Journal of Extreme Manufacturing, 2023, 5(2): 22008

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    Paper Information

    Category: Topical Review

    Received: Nov. 15, 2022

    Accepted: --

    Published Online: Jul. 26, 2024

    The Author Email: (jun@qdu.edu.cn)

    DOI:10.1088/2631-7990/acc76d

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