Fig. 1. Outline of dual-path TEA CO₂ laser

Fig. 2. Spot shape variation caused by angle of pitch detuning in resonant cavity. (a) Original status; (b) Detuning status

Fig. 3. Distribution settings of inner heat sources (purple) and exterior heat exchanging (yellow) in the section plane of single path cavity

Fig. 4. Simulation results under the circumstance of all sealed thermal sources. (a) Total temperature distribution; (b) Total deformation distribution; (c) Deformation distribution of the mounting surface of the output coupler, along the direction of optical axis; (d) Deformation distribution of the mounting surface of the servo motor, along the direction of optical axis

Fig. 5. Calculated deviation angle of cavity mirrors. (a) Without inner heat sources; (b) With all-sealed inner sources

Fig. 6. Schematic diagram of the flow path in the high voltage power supply chamber

Fig. 7. Overall resonant cavity deviation angle in the azimuth and pitch direction under different transfer convection coefficients

Fig. 8. Pulse energy of 1# laser under repetition 1 Hz, total 4200 pulses of sealed structure (red), 7200 pulses with DC fan adopted (blue)

Fig. 9. Compensation motor steps under different environmental temperatures by scanning maximum pulse energy

Fig. 10. Schematic diagram of the angular deviation compensation in the pitch direction