Acta Photonica Sinica, Volume. 52, Issue 7, 0752304(2023)
Study on Polarization Dependence of Ultrafast Combination Pulse Ablation on Silicon Surface(Invited)
Fig. 1. Schematic diagram of ultrafast combination pulse machining system
Fig. 2. SEM images of LIPSS structures with different pulse polarization orientations
Fig. 3. The LIPSS area varies with polarization angle and delay time
Fig. 5. SEM images of structures induced by different energy densities and pulse numbers
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Huiqiang SHI, Qian YAO, Weiyi YIN, Zihuai SU, Jiang YU, Juan SONG, Xian LIN, Ye DAI. Study on Polarization Dependence of Ultrafast Combination Pulse Ablation on Silicon Surface(Invited)[J]. Acta Photonica Sinica, 2023, 52(7): 0752304
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Received: Mar. 29, 2023
Accepted: May. 15, 2023
Published Online: Sep. 26, 2023
The Author Email: DAI Ye (yedai@shu.edu.cn)