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International Journal of Extreme Manufacturing, Volume. 2, Issue 3, 32005(2020)

Scanning probe lithography on calixarene towards single-digit nanometer fabrication

Marcus Kaestner and Ivo W Rangelow*
Author Affiliations
  • Institute of Micro- and Nanoelectronics, Nanoscale Systems Group, Faculty of Electrical Engineering and Information Technology, Ilmenau University of Technology, Gustav-Kirchhoff-Str. 1, 98693 Ilmenau, Germany
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    Marcus Kaestner, Ivo W Rangelow. Scanning probe lithography on calixarene towards single-digit nanometer fabrication[J]. International Journal of Extreme Manufacturing, 2020, 2(3): 32005

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    Paper Information

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    Received: Mar. 12, 2020

    Accepted: --

    Published Online: Jan. 28, 2021

    The Author Email: Rangelow Ivo W (ivo.rangelow@tu-ilmenau.de)

    DOI:10.1088/2631-7990/aba2d8

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology