Acta Photonica Sinica, Volume. 35, Issue 3, 352(2006)
Analysis of Reflection Phase Shift's Effect on MEMS-Based Filter's Full Width of Maximum Height
[1] [1] Sadot D,Boimovich E. Tunable optical filters for dense WDM networks. IEEE Communications Magazine,1998,36(12): 50~55
[2] [2] Ou Y,Cui F,Sun Y N. Acta Photonica Sinica,2003,32(9):1110~1113
[3] [3] Correia J H,Bartek M,Wolffenbuttel R F,et al. Bulkmicromachined tunable Fabry-Perot microinterferometer for the visible spectral range. Sensors Actuators A: Physical,1999,76(2) :191~196
[4] [4] Cui J M,Feng L H,Sun Y N,et al. Acta Photonica Sinica,2003,32(12) :1430~1433
[5] [5] Garrigues M,Leclercq J L,Viktorovitch P. Ⅲ-Ⅴ Semiconductor based MOEMS devices for optical telecommunications. Microelectronic Engineering,2002,61-62:933~945
[6] [6] Zuo Y H,Mao R W,Huang C J,et al. Acta Photonica Sinica,2003,32(6):661~664
[7] [7] Jaeheon H. Novel fabrication and characterization method of Fabry-Perot microcavity pressure sensors. Sensors Actuators A: Physical,1999,75(2):168~175
[8] [8] Li M Y,Yuen W,Li G S. Top-emitting micromechanical VCSEL with a 31.6 nm tuning range. IEEE Photonics Technology Letters,1998,10(1) :18~20
[9] [9] Xiang M,Cai Y M,Wu Y M,et al. Experimental study of the free spectral range (FSR) in FPI with a small palte gap. Optics Express,2003,11(23) :3147~3152
[10] [10] Shen W D,Liu X D,Huang B Q,et al. Analysis on the tunable optical properties of MOEMS filters based on Fabry-Perot Cavity. Optics Communications,2004,239(2):153~160
[11] [11] Tang Jinfa. Applied thin film optics. Shanghai: Shanghai science and technology press,1984.82~86
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Yin Xuehui, Li Chengfang, Wu Xiaoping, Hu Qianggao. Analysis of Reflection Phase Shift's Effect on MEMS-Based Filter's Full Width of Maximum Height[J]. Acta Photonica Sinica, 2006, 35(3): 352