Opto-Electronic Engineering, Volume. 47, Issue 2, 190617(2020)

Full-field heterodyne white light interferometry

Ru Hongwu1...2,*, Wu Lingling1, Zhang Wenxi2 and Li Yang2 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
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    References(8)

    [3] [3] Baryshev S V, Zinovev A V, Tripa C E, et al. White light interfe-rometry for quantitative surface characterization in ion sputtering experiments[J]. Applied Surface Science, 2012, 258(18): 6963–6968.

    [4] [4] Pavli.ek P, Michálek V. White-light interferometry—Envelope detection by Hilbert transform and influence of noise[J]. Optics and Lasers in Engineering, 2012, 50(8): 1063–1068.

    [7] [7] Hirai A, Matsumoto H. High-sensitivity surface-profile mea-surements by heterodyne white-light interferometer[J]. Optical Engineering, 2001, 40(3): 387–392.

    [8] [8] Matsumoto H, Hirai A. A white-light interferometer using a lamp source and heterodyne detection with acousto-optic modula-tors[J]. Optics Communications, 1999, 170(4–6): 217–220.

    [9] [9] Gross M, Goy R, Forget B C, et al. Heterodyne detection of multiply scattered monochromatic light with a multipixel detec-tor[J]. Optics Letters, 2005, 30(11): 1357–1359.

    [10] [10] Wu Z, Zhang W X, Bin X L, et al. Full-field heterodyne dynamic interferometry based on Hertz-level low differential-frequency Acousto-Optic Frequency Shifter[J]. Proceedings of SPIE, 2017, 10329: 1032905.

    [12] [12] Deck L, de Groot P. High-speed noncontact profiler based on scanning white-light interferometry[J]. Applied Optics, 1994, 33(31): 7334–7338.

    [13] [13] Hart M, Vass D G, Begbie M L. Fast surface profiling by spectral analysis of white-light interferograms with Fourier transform spectroscopy[J]. Applied Optics, 1998, 37(10): 1764–1769.

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    Ru Hongwu, Wu Lingling, Zhang Wenxi, Li Yang. Full-field heterodyne white light interferometry[J]. Opto-Electronic Engineering, 2020, 47(2): 190617

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    Paper Information

    Category: Article

    Received: Oct. 15, 2019

    Accepted: --

    Published Online: Mar. 6, 2020

    The Author Email: Hongwu Ru (ruhongwu_nic@163.com)

    DOI:10.12086/oee.2020.190617

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