Opto-Electronic Engineering, Volume. 47, Issue 2, 190617(2020)

Full-field heterodyne white light interferometry

Ru Hongwu1...2,*, Wu Lingling1, Zhang Wenxi2 and Li Yang2 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
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    In order to solve the problem that the displacement accuracy of linear displacement mechanism is toohigh in traditional white light interferometry, this paper proposes a full-field heterodyne white light interferometry. Thetechnology mainly uses the white light interference signal with difference frequency as the light source to realize thehigh-precision detection of the coherent peak position under the conditions of large push step and low push precision.In this paper, the mathematical model of white light heterodyne interference is established firstly, and then the overallsystem design scheme is proposed according to the light intensity signal characteristics provided by the mathemat-ical model. Then the feasibility of the measurement scheme is verified by experiments. At the end, theoretical anal-ysis and data comparison are carried out for the influence of various errors on the calculation accuracy of the algo-rithm. The results of error analysis show that the white-light heterodyne interferometry technology provides highermeasurement accuracy and better anti-interference performance, effectively reducing the strict dependence of tradi-tional white light interferometry on the accuracy of linear displacement mechanism, and is an optical free-form sur-face detection technology. More solutions are available.

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    Ru Hongwu, Wu Lingling, Zhang Wenxi, Li Yang. Full-field heterodyne white light interferometry[J]. Opto-Electronic Engineering, 2020, 47(2): 190617

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    Paper Information

    Category: Article

    Received: Oct. 15, 2019

    Accepted: --

    Published Online: Mar. 6, 2020

    The Author Email: Hongwu Ru (ruhongwu_nic@163.com)

    DOI:10.12086/oee.2020.190617

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