Optics and Precision Engineering, Volume. 29, Issue 10, 2287(2021)

Detecting divided aperture laser differential confocal radius measurement

Yan-hong LI... Shuai YANG, Shun TANG, Wei-qian ZHAO and Li-rong QIU* |Show fewer author(s)
Author Affiliations
  • Beijing Key Lab for Precision Optoelectronic Measurement Instrument and Technology, School of Optics and Photonics, Beijing Institute of Technology, Beijing100081, China
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    Figures & Tables(8)
    Detecting divided aperture laser differential confocal radius measuring principle
    Principle for off-axis differential detection using D-type aperture
    Virtual pinhole location algorithm
    Fixed focus sensitivity changes with vM
    Variation of fixed focus sensitivity with pinhole's radius
    Detecting divided aperture laser differential confocal radius measurement instrument
    Differential confocal curves of cat's eye point and confocal points
    • Table 1. Comparison of repeated measurement results of radius of curvature

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      Table 1. Comparison of repeated measurement results of radius of curvature

      TimesDDA-LDCRMLDCRM
      1-121.210 0-121.209 3
      2-121.209 6-121.209 9
      3-121.209 0-121.209 8
      4-121.208 8-121.210 2
      5-121.209 8-121.209 5
      6-121.208 5-121.209 9
      7-121.209 3-121.209 3
      8-121.209 1-121.209 6
      9-121.209 9-121.209 1
      10-121.210 0-121.210 2
      Average/mm-121.209 4-121.209 7
      Standard deviation/μm0.530 00.390 0
      Deviation value/μm0.3
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    Yan-hong LI, Shuai YANG, Shun TANG, Wei-qian ZHAO, Li-rong QIU. Detecting divided aperture laser differential confocal radius measurement[J]. Optics and Precision Engineering, 2021, 29(10): 2287

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    Paper Information

    Category: Modern Applied Optics

    Received: Mar. 5, 2021

    Accepted: --

    Published Online: Nov. 23, 2021

    The Author Email: QIU Li-rong (qiugrass@126.com)

    DOI:10.37188/OPE.20212910.2287

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