Optics and Precision Engineering, Volume. 29, Issue 10, 2287(2021)
Detecting divided aperture laser differential confocal radius measurement
Fig. 1. Detecting divided aperture laser differential confocal radius measuring principle
Fig. 2. Principle for off-axis differential detection using D-type aperture
Fig. 5. Variation of fixed focus sensitivity with pinhole's radius
Fig. 6. Detecting divided aperture laser differential confocal radius measurement instrument
Fig. 7. Differential confocal curves of cat's eye point and confocal points
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Yan-hong LI, Shuai YANG, Shun TANG, Wei-qian ZHAO, Li-rong QIU. Detecting divided aperture laser differential confocal radius measurement[J]. Optics and Precision Engineering, 2021, 29(10): 2287
Category: Modern Applied Optics
Received: Mar. 5, 2021
Accepted: --
Published Online: Nov. 23, 2021
The Author Email: QIU Li-rong (qiugrass@126.com)