Optics and Precision Engineering, Volume. 29, Issue 10, 2287(2021)

Detecting divided aperture laser differential confocal radius measurement

Yan-hong LI, Shuai YANG, Shun TANG, Wei-qian ZHAO, and Li-rong QIU*
Author Affiliations
  • Beijing Key Lab for Precision Optoelectronic Measurement Instrument and Technology, School of Optics and Photonics, Beijing Institute of Technology, Beijing100081, China
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    To improve the measurement accuracy of curvature radius, a method of detecting divided aperture laser differential confocal radius measurement was proposed. In this study, the principle of this new measurement and the algorithm of virtual pinhole positioning were explored. The detection light path of the confocal measurement system was blocked by a D-type aperture such that half of the measurement beam was focused on the focal plane detection charge-coupled device (CCD). The Airy disk detected by the CCD was divided into focal spot differential subtraction normalized detection using the virtual pinhole positioning algorithm. Then, the zero point of the differential confocal curve was used to accurately determine the focus of the "confocal" position and the "cat's eye" position of the test lens, measuring the distance between them. Finally, a high-precision measurement of the radius of curvature was achieved. Experiments and analysis show that the radius of curvature measured by this method is -121.209 4 mm, with a repeatability better than 5×10-6, without the need to adjust the hardware according to the parameters of the measuring objective and tested lenses. This meets the requirements for high-precision measurement of the radius of curvature and simplifies the optical path structure, reducing the structure and adjustment costs and providing a new method for rapid and high-precision measurements of the radius of curvature.

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    Yan-hong LI, Shuai YANG, Shun TANG, Wei-qian ZHAO, Li-rong QIU. Detecting divided aperture laser differential confocal radius measurement[J]. Optics and Precision Engineering, 2021, 29(10): 2287

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    Paper Information

    Category: Modern Applied Optics

    Received: Mar. 5, 2021

    Accepted: --

    Published Online: Nov. 23, 2021

    The Author Email: QIU Li-rong (qiugrass@126.com)

    DOI:10.37188/OPE.20212910.2287

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