Optics and Precision Engineering, Volume. 20, Issue 8, 1676(2012)
Ion beam etching of large aperture diffractive optical elements
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QIU Ke-qiang, ZHOU Xiao-wei, LIU Ying, XU Xiang-dong, LIU Zheng-kun, SHENG Bin, HONG Yi-lin, FU Shao-jun. Ion beam etching of large aperture diffractive optical elements[J]. Optics and Precision Engineering, 2012, 20(8): 1676
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Received: Dec. 11, 2011
Accepted: --
Published Online: Sep. 4, 2012
The Author Email: Ke-qiang QIU (blueleaf@ustc.edu.cn)
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