Optics and Precision Engineering, Volume. 22, Issue 6, 1500(2014)

Parameter optimization of drive circuit in silicon resonant accelerometer

ZHAO Jian*... SU Yan, ZHAO Yang and XIA Guo-ming |Show fewer author(s)
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    References(12)

    [1] [1] SEOK S, KIM H, CHUN H. An inertial-grade laterally-driven MEMS Differential Resonant Accelerometer [C]. IEEE Sensors Conference, Vienna, 2004: 654-657.

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    [5] [5] CUI J,CHI X Z,DING H T,et al.. Transient response and stability of the AGC-PI closed-loop controlled MEMS vibratory gyroscopes [J].Journal of Micromechanics and Microengineering, 2009,19(12): 1-17.

    [6] [6] ROBERT T M. Mode localization induced by a nonlinear control loop [J].Nolinear Dynamics, 2001,25: 221-236.

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    [10] [10] AALTONEN L,HALONEN K A I. An analog drive loop for a capacitive MEMS gyroscope[J]. Analog Integr Circ Sig Process 2010, 63(3): 465-476.

    [11] [11] CLAUDIA C, ALBERTO C. A high sensitivity uniaxial resonant accelerometer[C].// 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems. Hong Kong, 2010:260-263.

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    ZHAO Jian, SU Yan, ZHAO Yang, XIA Guo-ming. Parameter optimization of drive circuit in silicon resonant accelerometer[J]. Optics and Precision Engineering, 2014, 22(6): 1500

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    Paper Information

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    Received: Nov. 21, 2013

    Accepted: --

    Published Online: Jun. 30, 2014

    The Author Email: Jian ZHAO (elfevil007@126.com)

    DOI:10.3788/ope.20142206.1500

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