Optics and Precision Engineering, Volume. 22, Issue 6, 1500(2014)

Parameter optimization of drive circuit in silicon resonant accelerometer

ZHAO Jian*... SU Yan, ZHAO Yang and XIA Guo-ming |Show fewer author(s)
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    A fast design method for the drive circuit was proposed by combining Genetic Algorithm(GA) with a low frequency model to improve the transient performance of analog drive circuit for a low-power Silicon Resonant Accelerometer(SRA) and to shorten its design cycle. The method decoupled the closed drive circuit model in high and low frequencies to extract a low-frequency model from drive close-loop circuits. Combined the low-frequency model with the GA, an optimization method was proposed to optimize the circuit parameters for meeting the different actual restraints. A simulation model was established in SIMULINK based on one type of micro silicon resonant accelerometer, and the optimal parameters of PI controller with a most start-up speed were obtained under constraint conditions. Finally, a start-up experiment was performed to testify the simulation results. It shows that the start-up time is shorten from previous 0.42 s to 0.19 s and the over-shoot and phase error are less than 50% and 5°, respectively. The difference between the simulation and experiment is less than 5%, which falls within the acceptable range. It proves that the optimization method is correct and effective.

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    ZHAO Jian, SU Yan, ZHAO Yang, XIA Guo-ming. Parameter optimization of drive circuit in silicon resonant accelerometer[J]. Optics and Precision Engineering, 2014, 22(6): 1500

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    Paper Information

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    Received: Nov. 21, 2013

    Accepted: --

    Published Online: Jun. 30, 2014

    The Author Email: Jian ZHAO (elfevil007@126.com)

    DOI:10.3788/ope.20142206.1500

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