Acta Optica Sinica, Volume. 43, Issue 9, 0912001(2023)

Sharpness Evaluation Function for Line Patterns in Focal Length Measurement

Jihao Liu, Rongsheng Lu*, Zilong Zhang, and Ailin Zhang
Author Affiliations
  • School of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei 230009, Anhui, China
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    Figures & Tables(15)
    Grayscale distribution of line pattern
    Flow chart of evaluation function calculation based on Hough transform
    Two pixels perpendicular to direction of inscribed line
    Lens focal length measurement system
    Out of focus-positive focus-out of focus Porror reticle line pattern images. (a) 0° line pattern; (b) 45° line pattern; (c) 90° line pattern
    Normalized evaluation function curves (top left is partial magnification near peak). (a) 0° line pattern; (b) 30° line pattern; (c) 45° line pattern; (d) 60° line pattern; (e) 90° line pattern
    Ideal normalized clarity evaluation function
    • Table 1. Direction of gradient operator of grayscale evaluation function

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      Table 1. Direction of gradient operator of grayscale evaluation function

      Evaluation functionGradient direction
      Brenner0°(horizontal direction)
      Roberts45°,135°
      Laplace0°,90°
      TenengradSobel operator direction
      EOG0°,90°
    • Table 2. Detection results of Hough transform on 5 sets of line sequences

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      Table 2. Detection results of Hough transform on 5 sets of line sequences

      AngleAverage valueStandard deviationMaximum deviation
      00.0340.1040.5
      3029.6720.3551.4
      4544.8700.6731.8
      6059.7140.3561.1
      9089.9840.1480.4
    • Table 3. Quantitative evaluation results of evaluation function (0° line)

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      Table 3. Quantitative evaluation results of evaluation function (0° line)

      Type of evaluation functionPercentage of steep areas PS /%Focusing position deviation

      Mean of smoothing area

      MS

      Standard deviation of smoothing area σ

      Average time

      T¯ /ms

      Roberts58.020.0790.1030.05114.771
      Laplace65.501.6500.1180.05921.057
      Tenengrad52.300.0480.0430.02947.200
      EOG65.681.5870.1180.06115.114
      Proposed function48.590.0470.0490.03114.257
    • Table 4. Quantitative evaluation results of evaluation function (30° line)

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      Table 4. Quantitative evaluation results of evaluation function (30° line)

      Type of evaluation function

      Percentage of steep areas

      PS /%

      Focusing position deviation

      Mean of smoothing area

      MS

      Standard deviation of smoothing area

      σ

      Average time

      T¯ /ms

      Brenner51.610.0630.0970.06914.486
      Roberts44.950.0160.1600.07214.771
      Laplace33.632.3570.2550.10521.057
      Tenengrad44.190.0530.0580.03747.200
      EOG33.942.2320.2590.10415.114
      Proposed function43.810.0630.0590.03914.257
    • Table 5. Quantitative evaluation results of evaluation function (45° line)

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      Table 5. Quantitative evaluation results of evaluation function (45° line)

      Type of evaluation function

      Percentage of steep areas

      PS /%

      Focusing position deviation

      Mean of smoothing area

      MS

      Standard deviation of smoothing area

      σ

      Average time

      T¯/ms

      Brenner42.870.1530.0860.06614.200
      Roberts45.700.1650.1310.07414.400
      Laplace42.560.1570.1650.08020.886
      Tenengrad41.680.0510.0510.04246.886
      EOG42.950.1570.1600.08014.286
      Proposed function43.810.0520.0510.04214.229
    • Table 6. Quantitative evaluation results of evaluation function (60° line)

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      Table 6. Quantitative evaluation results of evaluation function (60° line)

      Type of evaluation function

      Percentage of steep areas

      PS /%

      Focusing position deviation

      Mean of smoothing area

      MS

      Standard deviation of smoothing area

      σ

      Average time

      T¯ /ms

      Brenner51.250.1760.0840.04514.545
      Roberts54.050.1600.1340.07315.152
      Laplace54.361.8760.1670.08221.485
      Tenengrad51.990.0840.0510.04248.455
      EOG54.111.8760.1660.08315.424
      Proposed function51.990.0960.0530.04314.364
    • Table 7. Quantitative evaluation results of evaluation function (90° line)

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      Table 7. Quantitative evaluation results of evaluation function (90° line)

      Type of evaluation function

      Percentage of steep areas

      PS /%

      Focusing position deviation

      Mean of smoothing area

      MS

      Standard deviation of smoothing area

      σ

      Average time

      T¯/ms

      Brenner49.910.0800.0410.02914.182
      Roberts45.940.4700.1520.08014.485
      Laplace46.142.0920.1950.12021.727
      Tenengrad50.310.0820.0390.03147.455
      EOG46.142.0920.1920.12314.545
      Proposed function49.910.0800.0410.02914.242
    • Table 8. Measurement results of focal length of lens

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      Table 8. Measurement results of focal length of lens

      FunctionLens focal length f /mmError /%
      30°45°60°90°
      Roberts39.990539.973139.969739.953239.96770.117
      Laplace39.855439.891239.972739.878039.84680.383
      Tenengrad39.993439.980039.969039.963939.96470.090
      EOG39.843139.906239.979739.873739.85260.392
      Proposed function39.992239.979539.972639.962939.96370.093
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    Jihao Liu, Rongsheng Lu, Zilong Zhang, Ailin Zhang. Sharpness Evaluation Function for Line Patterns in Focal Length Measurement[J]. Acta Optica Sinica, 2023, 43(9): 0912001

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Oct. 12, 2022

    Accepted: Dec. 5, 2022

    Published Online: May. 9, 2023

    The Author Email: Lu Rongsheng (rslu@hfut.edu.cn)

    DOI:10.3788/AOS221813

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