Acta Photonica Sinica, Volume. 51, Issue 5, 0551303(2022)
Chalcogenide Glass Nonlinear Integrated Optical Waveguide Fabrication by Hot Melt Smoothing and Micro-trench Filling（Invited）
Figures & Tables(8)
Fig. 1. Integrated chalcogenide glass photonic devices fabricated by different methods
Fig. 2. Chalcogenide glass waveguides with low-index strips on the surface of As2S3 glass film［69］
Fig. 3. Fabrication process of chalcogenide glass waveguides by hot melt smoothing and micro-trench filling
Fig. 4. As2S7 waveguide and microring samples fabricated by hot melt smoothing and micro-trench filling method
Fig. 5. Experimental measurement of the third order nonlinear coefficient of the chalcogenide glass waveguides［13］
Fig. 6. Experimental measurement of stimulated Brillouin scattering properties of chalcogenide glass waveguides［13］
Table 1. Optical parameters of typical third-order nonlinear waveguides at telecom band［4］
View tableView in ArticleTable 1. Optical parameters of typical third-order nonlinear waveguides at telecom band［4］
Materials n2/（m2·W-1） γ/（/W·km-1） Loss/（dB·m-1） TPA/（m·W-1） FOM High nonlinearity SiO2 fiber［ 29 ］3.2×10-20 21 10-3 - 大 As2S3 fiber［ 30 ］2×10-18 160 0.88 6.2×10-15 208 As2Se3 fiber［ 31 ］9×10-16 1 200 1 2.5×10-12 2.3 As2S3 ridge waveguide［ 32 ］2.9×10-18 1 700 5 6.2×10-15 304 Dispersion optimized As2S3 waveguide［ 33 ］3×10-18 9 900 60 6.2×10-15 312 Ge11.5As24Se64.5 nanowire［ 34 ］9×10-18 136 000 250 1×10-13 60 Silicon nanowire waveguide［ 35 ］6×10-18 150 000 400 5×10-12 0.77
Table 2. Optical and elastic parameters of typical materials for photonic integration［9］
View tableView in ArticleTable 2. Optical and elastic parameters of typical materials for photonic integration［9］
Materials Refractive index n Velocity of longitudinal sound wave vl/（m s-1） Brillouin gain coefficient gB/（m W-1） Photoelastic coefficient p12 SiO2 1.45 5 960 4.52×10-11 0.286 As2S3 2.45 2 500 0.74×10-9 0.244 As2Se3 2.8 2 250 6×10-9 0.266 CaF2 1.429 6 600 2.8×10-11 Si 3.5 8 900 -0.017
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Renduo QI, Yanfen ZHAI, Wei ZHANG, Yidong HUANG. Chalcogenide Glass Nonlinear Integrated Optical Waveguide Fabrication by Hot Melt Smoothing and Micro-trench Filling（Invited）[J]. Acta Photonica Sinica, 2022, 51(5): 0551303
Paper Information
Category: Special Issue for Micro/Nanophotonics
Received: Dec. 21, 2021
Accepted: Mar. 24, 2022
Published Online: Jun. 28, 2022
The Author Email: ZHANG Wei (zwei@tsinghua.edu.cn)
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