Optics and Precision Engineering, Volume. 12, Issue z2, 217(2004)
Design and finite element analysis of magnetic levitation precision stage
References(3)
[1] [1] WILLIAMS M, FAILL P,Bischoff P. Six degree of freedom Mag-Lev stage development[J]. SPIE, 1997,3051:856-867.
[5] [5] STEWART J T. Finite element modeling of micro electromechanical structures for sensing applications[J]. SPIE,1995, 2642: 194-201. (in Chinese)
[6] [6] HUGHES TJ R. The finite element method, linear static and dynamic analysis[M]. Prentice Hall, 1987.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Design and finite element analysis of magnetic levitation precision stage[J]. Optics and Precision Engineering, 2004, 12(z2): 217
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