Optics and Precision Engineering, Volume. 12, Issue z2, 217(2004)

Design and finite element analysis of magnetic levitation precision stage

[in Chinese]... [in Chinese], [in Chinese] and [in Chinese] |Show fewer author(s)
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    References(3)

    [1] [1] WILLIAMS M, FAILL P,Bischoff P. Six degree of freedom Mag-Lev stage development[J]. SPIE, 1997,3051:856-867.

    [5] [5] STEWART J T. Finite element modeling of micro electromechanical structures for sensing applications[J]. SPIE,1995, 2642: 194-201. (in Chinese)

    [6] [6] HUGHES TJ R. The finite element method, linear static and dynamic analysis[M]. Prentice Hall, 1987.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Design and finite element analysis of magnetic levitation precision stage[J]. Optics and Precision Engineering, 2004, 12(z2): 217

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    Received: Mar. 22, 2004

    Accepted: --

    Published Online: Nov. 3, 2006

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