Optics and Precision Engineering, Volume. 23, Issue 11, 3033(2015)

Thermal aberration in precision optical system

ZHANG Wei*... YU Xin-feng, ZHOU Lian-sheng, WANG Xue-liang, NI Ming-yang and PENG Hai-feng |Show fewer author(s)
Author Affiliations
  • [in Chinese]
  • show less
    References(12)

    [1] [1] UEHARA Y, MATSUYAMA T, NAKASHIMA T, et al.. Thermal aberration control for low k1 lithography [J]. SPIE, 2007, 6520: 65205V1-65205V11.

    [2] [2] NAKASHIMA T, OHMURA Y, OGATA T, et al.. Thermal aberration control in projection lens [J]. SPIE, 2008, 6924: 69241V1-69241V9.

    [3] [3] LIU P, SNADJR M, ZHANG X, et al.. A computational method for optical application specific lens control in microlithography [J]. SPIE, 2010, 7640: 76400M1-76400M9.

    [4] [4] FUKUHARA K, MIMOTOGI A, KONO T, et al.. Solutions with precise prediction for thermal aberration error in low k1 immersion lithography [J]. SPIE, 2013, 8683: 86830U1-86830U7.

    [5] [5] BEKAERT J, ANLOOK L, VANDENBERGHE G, et al.. Characterization and control of dynamic lens heating effects under high volume manufacturing conditions [J]. SPIE, 2011, 7973: 79730V1-79730V11.

    [6] [6] OHMURA Y, OGATA T, HIRAYAMA T, et al.. An aberration control of projection optics for multi-patterning lithography [J]. SPIE, 2011, 7973: 79730W1-79730W11.

    [7] [7] MULKENS J, KLERK J, LEENDERS M, et al.. Latest developments on immersion exposure systems [J]. SPIE, 2008, 6924: 69241P1-69241P12.

    [8] [8] STAALS F, ANDRYZHYIEUSKAYA A, BAKKER H, et al.. Advanced wavefront engineering for improved imaging and overlay applications on a 1.35 NA immersion scanner [J]. SPIE, 2011, 7973: 79731G1-79731G13.

    [9] [9] YOSHIHARA T, SUKEGAWA T, YABU N, et al.. Advanced aberration control in projection optics for double pattering [J]. Optical Microlithography XXII, SPIE, 2009, 7274: 72741L1-72741L9.

    [10] [10] CHEN H, YANG H J, YU X F, et al.. Simulated and experimental study of laser-beam induced thermal aberrations in precision optical systems [J]. Applied Optics, 2013, 52(18): 4370-4376.

    [11] [11] DOYLE K, GENBERG V, MICHELS G. Integrated Optomechanical Analysis [M]. Washington: SPIE Press, 2002.

    [12] [12] YU X F, NI M Y, ZHANG W, et al.. Analysis and experiments of the thermal-optical performance for a kinematically mounted lens element [J]. Applied Optics, 2014, 53(18): 4370-4376.

    CLP Journals

    [1] Meng Lingwu, Shao Shuai, Qiao Jian. Simulation analysis of the temperature field of the light guide mirror on mirror surface[J]. Infrared and Laser Engineering, 2018, 47(11): 1106008

    Tools

    Get Citation

    Copy Citation Text

    ZHANG Wei, YU Xin-feng, ZHOU Lian-sheng, WANG Xue-liang, NI Ming-yang, PENG Hai-feng. Thermal aberration in precision optical system[J]. Optics and Precision Engineering, 2015, 23(11): 3033

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Feb. 6, 2015

    Accepted: --

    Published Online: Jan. 25, 2016

    The Author Email: Wei ZHANG (zhangw@sklao.ac.cn)

    DOI:10.3788/ope.20152311.3033

    Topics