Lens Design of the Broadband Plan-apochromatic Microscope Objective

Yulong GUAN; Xiaobing ZHENG; Wenchao ZHAI

doi:10.3788/gzxb20235212.1223002

Acta Photonica Sinica, Volume. 52, Issue 12, 1223002(2023)

Lens Design of the Broadband Plan-apochromatic Microscope Objective

Yulong GUAN1... Xiaobing ZHENG2 and Wenchao ZHAI2,* |Show fewer author(s)

Author Affiliations

¹School of Physical Sciences，University of Science and Technology of China，Hefei 230026，China

²Key Laboratory of Optical Calibration and Characterization，Anhui Institute of Optics and Fine Mechanics，Hefei Institutes of Physical Science，Chinese Academy of Sciences，Hefei 230031，China

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Figures & Tables(18)

Fig. 1. Microscopic imaging measurement system

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Fig. 2. Flow chart of selection method for apochromatic glass

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Fig. 3. Microscopic objective structure in the patent

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Fig. 4. Initial structure of microscopic objective

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Fig. 5. Structure of microscopic objective

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Fig. 6. Image quality comparison before and after replacing glass

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Fig. 7. Final structure of microscopic objective

Fig. 8. MTF curves

Fig. 9. Longitudinal spherical aberration curves

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Fig. 10. Astigmatic field curves and distortion curves

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Fig. 11. Ray aberration curves

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Fig. 12. RMS wavefront error curves

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$Diffraction encircled energy distribution curves$

Fig. 13. Diffraction encircled energy distribution curves

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Table 1. Objective design specifications
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Table 1. Objective design specifications
Parameters Specifications
Magnification 20
Numerical aperture ≥0.3
Spectral range/nm 360~1 000
Field of view/mm ≥0.66
Parfocal length/mm 60
Working distance/mm ≥10
Distortion ≤0.5%

Table 2. Parameters of apochromatic glass assemblage

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Table 2. Parameters of apochromatic glass assemblage

Glass1	Glass2	Glass3	Ф₁	Ф₂	Ф₃	F₁	F₂/（×10^-5 mm）
H-FK95N	H-LaF50B	H-LaF52	1.838	-3.412	2.574	7.823	8.56
H-FK95N	H-LaF52	H-LaF53	2.614	-3.854	2.240	8.708	10.36
H-FK61	H-LaK2A	H-LaF52	3.990	1.373	-4.363	9.726	11.00
H-FK95N	H-LaK53B	H-ZBaF50	2.316	1.295	-2.610	6.221	13.29
H-FK95N	H-ZK11	H-ZK21	-4.331	2.895	2.436	9.661	13.36
H-FK95N	H-LaK53B	H-LaF52	2.636	-2.627	0.991	6.254	13.90
H-FK95N	H-ZK21	H-ZBaF50	2.951	-2.950	0.999	6.900	14.59

Table 3. Results of Abbe sine condition calculation

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Table 3. Results of Abbe sine condition calculation

Wavelength/nm	h/mm	sinU	f/mm	f₀/mm	Difference value/μm
360	3.006 4	0.300 6	10.002 4	10	2.43
400	3.005 8	0.300 5	10.001 5	10	1.50
460	3.004 7	0.300 4	10.001 3	10	1.27
500	3.004 2	0.300 4	10.001 6	10	1.64
560	3.003 5	0.300 3	10.002 4	10	2.39
650	3.002 7	0.300 2	10.003 3	10	3.35
750	3.002 0	0.300 1	10.003 8	10	3.77
850	3.001 2	0.300 0	10.003 5	10	3.49
1000	3.000 0	0.299 9	10.001 9	10	1.87

Table 4. Tolerance distribution
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Table 4. Tolerance distribution
Items Value
Fringe power/λ 2
Surface irregularity/λ 0.2
Central thickness/mm ±0.02
Airspace/mm ±0.02
Tilt/（°） ±0.01
Decenter/mm ±0.01
Refractive index ±0.001
Abbe-number ±0.5%

Table 5. Monte Carlo analysis results
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Table 5. Monte Carlo analysis results
Percent Value
98% 0.798 7
90% 0.825 8
80% 0.839 1
50% 0.859 7

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Yulong GUAN, Xiaobing ZHENG, Wenchao ZHAI. Lens Design of the Broadband Plan-apochromatic Microscope Objective[J]. Acta Photonica Sinica, 2023, 52(12): 1223002

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