Infrared and Laser Engineering, Volume. 51, Issue 9, 20220118(2022)
Full-field heterodyne phase shifting two-wavelength interferometry surface testing technologies
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Fig. 1. Schematic diagram of full-field heterodyne phase shifting two-wavelength interferometer system
Fig. 2. Physical figure of full-field heterodyne phase shifting two wavelength interferometer system
Fig. 6. Surface maps of full-field heterodyne phase shifting two-wavelength interferometer system
Fig. 8. Step height maps of full-field heterodyne phase shifting two-wavelength interferometer system
Table 1. PV values and RMS values of tested aspheric
View tableView in ArticleTable 1. PV values and RMS values of tested aspheric
No. PV/μm RMS/μm 1 4.1578 1.0449 2 4.1598 1.0452 3 4.1593 1.0453 4 4.1600 1.0457 5 4.1587 1.0460 6 4.1551 1.0461 7 4.1509 1.0459 8 4.1452 1.0453 9 4.1416 1.0446 10 4.1384 1.0439
Table 2. Heights of step
View tableView in ArticleTable 2. Heights of step
No. Height/μm 1 1.2527 2 1.2542 3 1.2510 4 1.2522 5 1.2505 6 1.2554 7 1.2491 8 1.2509 9 1.2511 10 1.2546
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Guoxiang Fan, Yang Li, Wenxi Zhang, Zhou Wu, Tong Lv. Full-field heterodyne phase shifting two-wavelength interferometry surface testing technologies[J]. Infrared and Laser Engineering, 2022, 51(9): 20220118
Paper Information
Category: Special issue—Ultra precision manufacture and testing technology of optical aspheric surface
Received: Feb. 22, 2022
Accepted: --
Published Online: Jan. 6, 2023
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