Researching | Analysis of 300 mm Cz Silicon Single Crystal Growth with Constant Growth Rate

Journal of Synthetic Crystals, Volume. 49, Issue 5, 811(2020)

Analysis of 300 mm Cz Silicon Single Crystal Growth with Constant Growth Rate

GAO Yu1... ZHU Liang1, ZHANG Jun1 and LOU Zhongshi2 |Show fewer author(s)

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GAO Yu, ZHU Liang, ZHANG Jun, LOU Zhongshi. Analysis of 300 mm Cz Silicon Single Crystal Growth with Constant Growth Rate[J]. Journal of Synthetic Crystals, 2020, 49(5): 811

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Published Online: Aug. 6, 2020

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Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology