Optics and Precision Engineering, Volume. 16, Issue 4, 605(2008)
Simulation and experiment of laser bending of silicon sheet
References(3)
[1] [1] PETERSON K E.Silicon as a mechanical material[J].IEEE,1982,70:420-457.
[4] [4] EXNER H,L(O)SCHNER U.Contactless laser bending of silicon microstructures[J].SPIE,2003,5116:383-392.
[7] [7] ZHANG X R,CHEN G.Numerical simulation of pulsed laser bending[J].Journal of Applied Mechanics,2002,69:254-260.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Simulation and experiment of laser bending of silicon sheet[J]. Optics and Precision Engineering, 2008, 16(4): 605
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