Optics and Precision Engineering, Volume. 17, Issue 2, 267(2009)
Research on electrostatic deformation of membrane mirror
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ZHANG Ying, JIN Guang. Research on electrostatic deformation of membrane mirror[J]. Optics and Precision Engineering, 2009, 17(2): 267
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Received: Jan. 21, 2008
Accepted: --
Published Online: Oct. 9, 2009
The Author Email: Ying ZHANG (eagle1978@sina.com)
CSTR:32186.14.
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