Acta Optica Sinica, Volume. 5, Issue 7, 619(1985)
Sensitivity factor of reflectance to the change of film thickness in ellipsometry
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WANG ZHIGANG, DING LANTING. Sensitivity factor of reflectance to the change of film thickness in ellipsometry[J]. Acta Optica Sinica, 1985, 5(7): 619
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