Acta Optica Sinica, Volume. 41, Issue 9, 0911004(2021)
Local Level Set Based Mask Optimization with Semi-Implicit Discretization
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Yijiang Shen, Xiaopeng Wang, Yanzhou Zhou, Zhenrong Zhang. Local Level Set Based Mask Optimization with Semi-Implicit Discretization[J]. Acta Optica Sinica, 2021, 41(9): 0911004
Category: Imaging Systems
Received: Jul. 22, 2020
Accepted: Dec. 2, 2020
Published Online: May. 8, 2021
The Author Email: Shen Yijiang (yjshen@gdut.edu.cn)