Spectroscopy and Spectral Analysis, Volume. 36, Issue 10, 3388(2016)
Analysis of Glass Surface Modification with Ion Beam Based on Ellipsometry
References(9)
[1] [1] Ochs D, Schroeder J, Cord B, et al. Surf. Coat. Tech., 2001, 142-144: 767.
[2] [2] West G T, Kelly P J. Thin Solid Films, 2014, 469-470: 70.
[3] [3] Chen Dichun, Jiang Bailing, Shi Huiying, et. al. Vacuum, 2012, 86: 1576.
[4] [4] Klaus H, Anette J K. United States Patent: US 6, 919, 133B2, 2005-07-19.
[6] [6] Kaufman H R, Cuomo J J, Harper J M E. J. Vac. Sci. Tech., 1982, 21(3): 725.
[7] [7] Kahn M, Cekada M, Schoberl T, et. al. Thin Solid Films, 2009, 517: 6502.
[8] [8] Seunghun L, Eun Yeon B, Jong-Kuk K, et. al. Curr. Appl. Phys., 2014, 14: S180.
[10] [10] Galca A C, Secu M, Vlad A, et. al. Thin Solid Films, 2010, 518: 4603.
[11] [11] Ma B, Shen Z X, He P F, et al. Optik, 2011, 122: 1418.
Tools
Get Citation
Copy Citation Text
SUN Yao, WANG Hong. Analysis of Glass Surface Modification with Ion Beam Based on Ellipsometry[J]. Spectroscopy and Spectral Analysis, 2016, 36(10): 3388
Paper Information
Received: Aug. 10, 2015
Accepted: --
Published Online: Dec. 30, 2016
The Author Email:
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20