Photonics Research, Volume. 11, Issue 12, 2093(2023)

Free-space beam shaping and steering based on a silicon optical phased array

Wenbo Ren1、†, Qingqing Liang1、†, Jijun Feng1,2、*, Haipeng Liu1, Jianhua Hu1, Shuo Yuan1, Xincheng Xia1, Wei Jiang1, Qiwen Zhan1,4, and Heping Zeng2,3
Author Affiliations
  • 1Shanghai Key Laboratory of Modern Optical System, Engineering Research Center of Optical Instrument and System (Ministry of Education), School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
  • 2Chongqing Key Laboratory of Precision Optics, Chongqing Institute of East China Normal University, Chongqing 401120, China
  • 3State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200241, China
  • 4e-mail: qwzhan@usst.edu.cn
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    Figures & Tables(11)
    Element phase distribution with (a) ϕ0=5π and (b) ϕ0=10π, respectively.
    Simulated near-field distribution above the array for (a) a Gaussian beam with n=0, ϕ0=0 and P0=1, (b) n=1 with a=1, ϕ0=5π, and P0=1, (c) n=2 with a=0.1, ϕ0=5π, and P0=1, and (d) n=3 with a=0.05, ϕ0=5π, and P0=1, where the dotted rectangle shows a hollow-core central cavity. (e), (f), (g), and (h) are the corresponding simulated curves of the transverse light field at Z=4 mm when n=0, 1, 2, and 3, respectively.
    Simulated near-field distribution above the array for the cubic phase change combination with (a) ϕ0=5π and P0=1, (b) ϕ0=10π and P0=1, (c) ϕ0=20π and P0=1, and (d) ϕ0=10π and P0=1/2.
    Simulated steering results for a quasi-Bessel beam with a cubic phase change combination and varying r of (a) −0.2, (b) 0.03, (c) 0.1, and (d) 0.2, respectively.
    (a) Schematic diagram of silicon OPA with (b) and (c) for the microscope image of the packaged device and OPA chip, respectively. (d) SEM image of the grating waveguide antenna.
    Schematic illustration of the experimental setup for the characterization of beam shaping and steering.
    (a) Measured cross-sectional intensity distribution of OPA along the exit Z direction in the free space for Gaussian beam with n=0. (b) Cross-sectional profile of the recorded light spot, with (c) and (d) for the steering result of simulation and experiment with a deflection angle of about ±70°, respectively.
    (a) Measured cross-sectional intensity above the chip for a quasi-Bessel beam generation (n=1, ϕ0=5π and P0=1), with top-down intensity (b) within the quasi-Bessel region of the emitted beam (Z=4.5 mm), (c) at the edge of the quasi-Bessel region (Z=9.5 mm), and (d) after breakdown of the quasi-Bessel region (Z=17.7 mm).
    (a) Measured cross-sectional intensity above the chip for a high-order quasi-Bessel beam generation (n=3, ϕ0=10π, and P0=1), with top-down intensity (b) near the converged region (Z=2.9 mm), (c) at the hollow-core region (Z=3.5 mm), and (d) at the split hollow core region (Z=4.5 mm). (e)–(g) are the simulated light field distributions at the corresponding region.
    Normalized intensity distribution of the simulated high-order quasi-Bessel beam above the chip at Z position of (a) 3.5 mm and (c) 4.5 mm, with (b) and (d) for the corresponding measured results, respectively.
    • Table 1. Simulated Power FWHM and Beam Length for the OPA with Cubic Phase Change Combination

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      Table 1. Simulated Power FWHM and Beam Length for the OPA with Cubic Phase Change Combination

      ParametersPower FWHM (μm)Beam Length (mm)
      ϕ0=5π and P0=19.7281.271
      ϕ0=10π and P0=16.3360.624
      ϕ0=20π and P0=14.6720.472
      ϕ0=10π and P0=1/26.4640.651
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    Wenbo Ren, Qingqing Liang, Jijun Feng, Haipeng Liu, Jianhua Hu, Shuo Yuan, Xincheng Xia, Wei Jiang, Qiwen Zhan, Heping Zeng. Free-space beam shaping and steering based on a silicon optical phased array[J]. Photonics Research, 2023, 11(12): 2093

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    Paper Information

    Category: Integrated Optics

    Received: May. 2, 2023

    Accepted: Sep. 30, 2023

    Published Online: Nov. 24, 2023

    The Author Email: Jijun Feng (fjijun@usst.edu.cn)

    DOI:10.1364/PRJ.494546

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