Optics and Precision Engineering, Volume. 32, Issue 13, 2081(2024)
Double-sided lapping uniformity of LiTaO3 based on three-dimensional trajectory of particles
Fig. 4. Micro contact morphology between fixed abrasive lapping pad and workpiece
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Saisai XUE, Xiaoguang GUO, Yufan JIA, Shang GAO, Renke KANG. Double-sided lapping uniformity of LiTaO3 based on three-dimensional trajectory of particles[J]. Optics and Precision Engineering, 2024, 32(13): 2081
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Received: Jan. 30, 2024
Accepted: --
Published Online: Aug. 28, 2024
The Author Email: XUE Saisai (1121176472@qq.com)