Optics and Precision Engineering, Volume. 32, Issue 13, 2081(2024)

Double-sided lapping uniformity of LiTaO3 based on three-dimensional trajectory of particles

Saisai XUE*... Xiaoguang GUO, Yufan JIA, Shang GAO and Renke KANG |Show fewer author(s)
Author Affiliations
  • State Key Laboratory of High-Performance Precision Manufacturing, Dalian University of Technology, Dalian116024, China
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    Figures & Tables(16)
    Material removal in different models
    Abrasive unit cell model
    Surface morphology of fixed abrasive pad
    Micro contact morphology between fixed abrasive lapping pad and workpiece
    Penetration depth of abrasive
    Schematic diagram of double-sided lapping movement
    Schematic diagram of wafer discretization
    CTD calculation process
    Variation law of CTD with m and n
    Variation law of CTD with n
    Variation of CTD with m
    Consolidated abrasive lapping devices
    Variation of CTD and TTV with m and n
    • Table 1. Specific parameters of MoriNaga ED9B-10L-3M double-sided lapping machine

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      Table 1. Specific parameters of MoriNaga ED9B-10L-3M double-sided lapping machine

      ParameterValue
      Speed of lower plate ωp/(r·min-10~45
      Speed of sun wheel ω1/(r·min-10~20
      Speed of gear ring ω3/(r·min-10~16
      Number of teeth of sun wheel Z198
      Number of teeth of planetary wheel Z2108
      Number of teeth of gear ring Z3314
    • Table 2. Experimental parameters

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      Table 2. Experimental parameters

      ParameterValueParameterValue
      ρ3.5 g/cm3s5.3 mm
      D4 μmC0.5 g/cm3
      ψ45°Hv11.2 GPa
      r1.9 mmE222.4 GPa
      H1.5 mmSw81 cm2
    • Table 3. CTD at different m and n

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      Table 3. CTD at different m and n

      mnCTDmnCTD
      0.61.00.143 30.81.90.154 7
      0.61.30.159 90.82.20.155 7
      0.61.60.171 70.91.00.200 9
      0.61.90.153 40.91.30.135 4
      0.62.20.156 30.91.60.147 2
      0.71.00.141 80.91.90.154 6
      0.71.30.142 90.92.20.154 6
      0.71.60.152 91.01.00.214 6
      0.71.90.155 71.01.30.182 8
      0.72.20.152 11.01.60.140 8
      0.81.00.157 71.01.90.132 9
      0.81.30.132 21.02.20.139 9
      0.81.60.140 4
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    Saisai XUE, Xiaoguang GUO, Yufan JIA, Shang GAO, Renke KANG. Double-sided lapping uniformity of LiTaO3 based on three-dimensional trajectory of particles[J]. Optics and Precision Engineering, 2024, 32(13): 2081

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    Paper Information

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    Received: Jan. 30, 2024

    Accepted: --

    Published Online: Aug. 28, 2024

    The Author Email: XUE Saisai (1121176472@qq.com)

    DOI:10.37188/OPE.20243213.2081

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