Laser & Optoelectronics Progress, Volume. 58, Issue 11, 1112005(2021)
FSI Ranging Error Compensation Method Based on Laser Self-Mixing Vibration Measurement
Figures & Tables(10)
Fig. 1. Optical path of FSI ranging error compensation based on laser self-mixing vibration measurement
Fig. 2. Simulation results of vibration measurement. (a) Simulated and measured displacements; (b) amplitude deviation
Fig. 3. Simulation results of resampled phase signal. (a) Before compensation; (b) after compensation
Fig. 5. Three signals collected when target vibrates. (a) Ranging signal; (b) vibration signal; (c) reference signal
Fig. 6. Phase of signal. (a) Phase measured using phase unwrapping method; (b) phase of resampled signal before compensation; (c) phase of resampled signal after compensation
Table 1. Simulation results of deviation under different amplitudes
View tableTable 1. Simulation results of deviation under different amplitudes
Frequency /Hz Amplitude /μm Distance /m Error of amplitude /nm Error of ranging /μm 60 2 1 1.1 2.0 4 1.1 1.2 6 1.3 0.5 8 1.3 -1.0 10 1.5 -3.1
Table 2. Simulation results of deviation under different distances
View tableTable 2. Simulation results of deviation under different distances
Frequency/Hz Amplitude/μm Distance /m Error of amplitude /nm Error of ranging /μm 60 5 2 1.3 -1.3 4 1.3 -1.7 6 1.3 -0.9 8 1.3 -0.9 10 1.3 -1.1
Table 3. Measurement results and standard deviations under different voltages
View tableTable 3. Measurement results and standard deviations under different voltages
Loud-speaker voltage /mV Measured amplitude /nm Standard deviation /nm Vibration measurement Distance measurement before compensation Distance measurement after compensation 0 21.9×103 100 2272.8 9.7 2055.3×103 25.7×103 150 3384.1 6.0 2297.3×103 40.4×103 200 4627.8 3.3 2560.6×103 33.7×103 250 5887.8 9.1 2742.9×103 34.2×103 300 7102.1 7.9 3270.6×103 21.4×103
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Xiaobo Chai, Tengfei Wu, Pufu Yin. FSI Ranging Error Compensation Method Based on Laser Self-Mixing Vibration Measurement[J]. Laser & Optoelectronics Progress, 2021, 58(11): 1112005
Paper Information
Category: Instrumentation, Measurement and Metrology
Received: Oct. 22, 2020
Accepted: Dec. 2, 2020
Published Online: Jun. 7, 2021
The Author Email: Wu Tengfei (wtf@tju.edu.cn)
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