Laser & Optoelectronics Progress, Volume. 58, Issue 11, 1112005(2021)
FSI Ranging Error Compensation Method Based on Laser Self-Mixing Vibration Measurement
In the process of laser frequency scanning interferometry ranging, the target vibration introduces Doppler shift in the ranging interference signals which results in the spectral broadening of the signal and the amplification effect of ranging errors. To reduce the effect of vibration on ranging results, we proposed a ranging error compensation method based on laser self-mixing vibration measurement. This method compensates the phase modulation of the target vibration on the ranging interference signal by synchronously measuring the phase change of the self-mixing interference signal, and meanwhile the frequency resampling method is used to correct the laser frequency modulation nonlinearity. Finally, the feasibility of the proposed method is verified by simulation and experiment. In the experiment, when the measured target amplitude was 7102.1 nm, the measured vibration standard deviation was 7.9 nm, the range measurement standard deviation before compensation was 3270.6 μm, and the range measurement standard deviation after compensation was reduced to 21.4 μm,which was close to the case of no vibration, indicating that the amplification problem of ranging errors caused by target vibration was effectively solved.
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Xiaobo Chai, Tengfei Wu, Pufu Yin. FSI Ranging Error Compensation Method Based on Laser Self-Mixing Vibration Measurement[J]. Laser & Optoelectronics Progress, 2021, 58(11): 1112005
Category: Instrumentation, Measurement and Metrology
Received: Oct. 22, 2020
Accepted: Dec. 2, 2020
Published Online: Jun. 7, 2021
The Author Email: Wu Tengfei (wtf@tju.edu.cn)