Semiconductor Optoelectronics, Volume. 43, Issue 3, 547(2022)
Design and Fabrication of Four Spectral TDICCD Image Sensor
A kind of four spectral timedelayintegrated charge coupled device (TDI CCD) is designed and fabricated by integrating four TDICCDs on one chip. Different narrowband filter films are plated on the corresponding positions of the light window to realize multiband light splitting. For the designed TDICCD, its pixel size is 28μm×28μm, the horizontal pixel size is 3072 elements, the line frequency is 10kHz, the charge transfer efficiency is 0.99999, the saturation output voltage is 2650mV, the antiblooming ability is more than 100×, and the dynamic range is 7143∶1.
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XU Daorun, LIU Yeqi, YUAN Anbo, LIAO Naiman, QU Pengcheng, LUO Chunlin, ZHANG Xiaoqin. Design and Fabrication of Four Spectral TDICCD Image Sensor[J]. Semiconductor Optoelectronics, 2022, 43(3): 547
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Received: Feb. 26, 2022
Accepted: --
Published Online: Aug. 1, 2022
The Author Email: Daorun XU (403236274@qq.com)