Fig. 1. Laser etching model with micro airflow array pressurization

Fig. 2. Analysis of gas flow and pressure in laser etching process

Fig. 3. Effects of airflow pressure and etching gap on maximum gas velocity

Fig. 4. Effects of airflow pressure and etching gap on maximum surface pressure

Fig. 5. Morphology of microporous ceramic surface and its diameter

Fig. 6. Schematic diagram of experimental devices and laser path

Fig. 7. Surface flatness measurement of ITO glass

Fig. 8. Surface micro deformation of ITO glass

Fig. 9. SEM morphology of lines on ITO glass

Fig. 10. ITO glass flatness pressurized by microporous airflow

Fig. 11. Relationship between airflow pressure and flatness PV

Fig. 12. Relationship between etching gap and flatness PV

Fig. 13. Morphology of etching circuit on ITO glass surface