Chinese Optics Letters, Volume. 11, Issue 4, 041405(2013)
Effects of prism beam expander and slits on excimer laser linewidth narrowing module
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Haibo Zhang, Zhijun Yuan, Jun Zhou, Yunrong Wei, Qihong Lou. Effects of prism beam expander and slits on excimer laser linewidth narrowing module[J]. Chinese Optics Letters, 2013, 11(4): 041405
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Received: Sep. 29, 2012
Accepted: Dec. 7, 2012
Published Online: Mar. 19, 2013
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