Infrared and Laser Engineering, Volume. 33, Issue 2, 209(2004)

Research on microlens array for improving the fill factor of CCD image sensors

[in Chinese]1、*, [in Chinese]2, and [in Chinese]1
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  • 2[in Chinese]
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    References(5)

    [2] [2] Ichiro Murakami, Takashi Nakano, Keisuke Hatano, et al. Technologies to improve photo-sensitivity and reduce VOD shutter voltage for CCD image sensors[J]. IEEE Transactions on Electron Devices, 2000,47(8):1566-1572.

    [3] [3] M Edward Motamedi, William E Tennant, Haluk O Sankur, et al. Micro-optic integration with focal plane arrays[J]. Optical Engineering, 1997, 36(5):1374-1381.

    [4] [4] Tsukamoto A,Kamisaka W,Senda H,et al. High sensitivity pixel technology for a 1/4-inch PAL 430K pixel IT-CCD[A]. Custom Integrated Circuits Conference, Proceedings of the IEEE 1996[C]. 1996.39-42.

    [5] [5] Chen Sihai, Yi Xinjian, Li Yi, et al. Hybrid integration between long focus microlens array and IR detector array[J]. International J Infrared and Millimeter Waves, 2001,22(3): 393-398.

    [6] [6] Yongqi Fu, Ngoi Kok Ann Bryan. Investigation of integrated diffractive/refractive microlens microfabricated by focused ion beam[J]. Review of Scientific Instruments, 2000,71(6):2263-2266.

    CLP Journals

    [1] SUN Yan-jun, LENG Yan-bing, CHEN Zhe, DONG Lian-he. Square Aperture Spherical Microlens Array for Infrared Focal Plane[J]. Acta Photonica Sinica, 2012, 41(4): 399

    [2] Yikang HE, Pengcheng WANG, Shuanglong BIAN, Fangning LI, Pengyu JIANG, Xianye LI, Baoqing SUN. Recent advances in diffraction imaging with low temporal coherent illumination (invited)[J]. Infrared and Laser Engineering, 2024, 53(9): 20240362

    [3] AN Qi-guang, ZHANG Yi, REN Xiu-juan, LI Zhong-he, NING Ti. Design and Experiment of Microlens Array for InSb Infrared Detectors[J]. INFRARED, 2023, 44(9): 23

    [4] Qingming Liao, Zexin Feng. Design methods of freeform surface diffractive optics for beam shaping (invited)[J]. Infrared and Laser Engineering, 2023, 52(7): 20230430

    [5] Hu Wang, Yu He. Optical lithography on tilted and curved surfaces based on computer generated holography[J]. Infrared and Laser Engineering, 2022, 51(11): 20220136

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    [in Chinese], [in Chinese], [in Chinese]. Research on microlens array for improving the fill factor of CCD image sensors[J]. Infrared and Laser Engineering, 2004, 33(2): 209

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    Paper Information

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    Received: Jun. 2, 2003

    Accepted: Aug. 8, 2003

    Published Online: May. 25, 2006

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