Infrared and Laser Engineering, Volume. 33, Issue 2, 209(2004)
Research on microlens array for improving the fill factor of CCD image sensors
To improve the detecting sensitivity of CCD image sensors,the design method and the fabrication technology of 516×516 element microlens array on fused silica substrate are introduced briefly. The test data indicate that the microlens array has perfect surface profile,good uniformity and optical performance. Consequently the fill factors of microlens array increase greatly.
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[in Chinese], [in Chinese], [in Chinese]. Research on microlens array for improving the fill factor of CCD image sensors[J]. Infrared and Laser Engineering, 2004, 33(2): 209
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