Semiconductor Optoelectronics, Volume. 43, Issue 6, 1055(2022)
Reliability Analysis of MEMS Accelerometer in Vibration Environment
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LI Mingzhu, XU Gaobin, DONG Nana, YUAN Ting, MA Yuanming, FENG Jianguo. Reliability Analysis of MEMS Accelerometer in Vibration Environment[J]. Semiconductor Optoelectronics, 2022, 43(6): 1055
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Received: Sep. 8, 2022
Accepted: --
Published Online: Jan. 27, 2023
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