Researching | Structural and component analysis of boron carbide films prepared by magnetron sputtering

Optical Instruments, Volume. 46, Issue 2, 63(2024)

Structural and component analysis of boron carbide films prepared by magnetron sputtering

Jingtao ZHU1... Yang LIU1,2, Jianrong ZHOU2,3,*, Xiaojuan ZHOU2,3, Zhijia SUN2,3 and Mingqi CUI3 |Show fewer author(s)

Author Affiliations

¹School of Physical and Engineering, Tongji University, Shanghai 200092, China

²Spallation Neutron Source Science Center, Dongguan 523803, China

³Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China

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Figures & Tables(5)

Fig. 1. SAED diagram of the Ti/B₄C multilayer sample

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Fig. 2. TEM cross section of the Ti/B₄C multilayer sample

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Fig. 3. ToF-SIMS depth profile curve of the Ti/B₄C multilayer sample

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Fig. 4. XPS test curve of the Ti/B₄C multilayer samples

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Fig. 5. Neutron detection efficiency test

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Jingtao ZHU, Yang LIU, Jianrong ZHOU, Xiaojuan ZHOU, Zhijia SUN, Mingqi CUI. Structural and component analysis of boron carbide films prepared by magnetron sputtering[J]. Optical Instruments, 2024, 46(2): 63

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Received: Mar. 13, 2023

Accepted: --

Published Online: Apr. 30, 2024

The Author Email: ZHOU Jianrong (zhoujr@ihep.ac.cn)

DOI:10.3969/j.issn.1005-5630.202303130055

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology