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Chinese Optics Letters, Volume. 17, Issue 10, 100201(2019)

Micro-fabrication and hermeticity measurement of alkali-atom vapor cells based on anodic bonding

Lu Zhang1, Wendong Zhang1, Shougang Zhang2, and Shubin Yan1、*
Author Affiliations
  • 1Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China
  • 2Key Laboratory of Time and Frequency Primary Standards, National Time Service Center, Chinese Academy of Sciences, Xi’an 710600, China
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    Lu Zhang, Wendong Zhang, Shougang Zhang, Shubin Yan. Micro-fabrication and hermeticity measurement of alkali-atom vapor cells based on anodic bonding[J]. Chinese Optics Letters, 2019, 17(10): 100201

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    Paper Information

    Category: Atomic and Molecular Physics

    Received: May. 17, 2019

    Accepted: Jul. 26, 2019

    Posted: Jul. 26, 2019

    Published Online: Aug. 29, 2019

    The Author Email: Shubin Yan (shubin_yan@nuc.edu.cn)

    DOI:10.3788/COL201917.100201

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology