Microhollow cathode discharge and excimer light source

Chinese Journal of Quantum Electronics, Volume. 22, Issue 2, 142(2005)

[in Chinese]^1,2、* and [in Chinese]¹

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¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese]. Microhollow cathode discharge and excimer light source[J]. Chinese Journal of Quantum Electronics, 2005, 22(2): 142

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Received: Dec. 1, 2003

Accepted: --

Published Online: May. 15, 2006

The Author Email: (lchwan@hust.edu.cn)

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