Optics and Precision Engineering, Volume. 31, Issue 15, 2236(2023)
Trajectory tracking control for tri-axial fast tool servo using hybrid electromagnetic-piezoelectric actuation
Recently, tri-axial fast tool servos, which offer higher cutting flexibility, are being applied to the machining of complex optical surfaces. However, the trajectory tracking performance is significantly affected by various factors, including cross-coupling, high-frequency resonance, and hysteresis nonlinearity. To address these issues, a comprehensive compensation strategy was proposed to achieve high-performance tracking control of spatial trajectories. Specifically, a notch filter was introduced to suppress high-frequency resonance, and feedforward decoupling compensation was employed to weaken the XY planar cross-coupling. Furthermore, a Prandtl-Ishlinskii model was cascaded with a dynamic model to describe the dynamic hysteresis for each axis, and a hysteresis feedforward compensation model was constructed without solving the inversion of the hysteresis model. The sweep test results show that the adopted notch filter can eliminate the high-frequency resonance effectively. The feedforward decoupling compensation further reduces the XY planar cross-coupling by approximately 14 dB. The wideband hysteresis modeling results indicate that the dynamic hysteresis modeling errors of the XY plane actuation and Z-axial actuation are less than ±2.2% and ±1.8%, respectively. With proportional-integral-derivative control used for the main controller, the wideband tracking (10-100 Hz) shows that the maximum tracking error for each axis using the comprehensive compensation strategy is only 25% to 50% that when only inverse dynamic feedforward compensation is used. Furthermore, the tracking results for the spatial trajectory demonstrate the effectiveness of the proposed comprehensive compensation control strategy.
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Zhiyuan ZHU, Zihui ZHU, Xiaoqin ZHOU, Limin ZHU, Zhiwei ZHU. Trajectory tracking control for tri-axial fast tool servo using hybrid electromagnetic-piezoelectric actuation[J]. Optics and Precision Engineering, 2023, 31(15): 2236
Category: Micro/Nano Technology and Fine Mechanics
Received: Mar. 27, 2023
Accepted: --
Published Online: Sep. 5, 2023
The Author Email: ZHU Zhiwei (zw.zhu@njust.edu.cn)