Acta Optica Sinica, Volume. 19, Issue 6, 800(1999)
Effects of Roughness on Characterization of Soft X-Ray Multilayer Coating
The effects of roughness on the reflectance of soft X-ray multilayer coating are discussed experimentally and theorectically. The suitable method for analyzing the effects of roughness, and the direction of studying the roughness are presented.
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[in Chinese], [in Chinese], [in Chinese]. Effects of Roughness on Characterization of Soft X-Ray Multilayer Coating[J]. Acta Optica Sinica, 1999, 19(6): 800
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