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Optoelectronics Letters, Volume. 14, Issue 3, 210(2018)

Two-photon polymerization fabrication and Raman spectroscopy research of SU-8 photoresist using the femtosecond laser

Zi-jian CHEN1... Ji YAO1, Qing-ji XU1 and Zhen-hua and WANG2,* |Show fewer author(s)
Author Affiliations
  • 1New Energy Department, Tianjin Sino-German University of Applied Sciences, Tianjin 300350, China
  • 2Key Laboratory of Weak Light Nonlinear Photonics, Ministry of Education, TEDA Institute of Applied Physics, Nankai University, Tianjin 300457, China
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    CHEN Zi-jian, YAO Ji, XU Qing-ji, and WANG Zhen-hua. Two-photon polymerization fabrication and Raman spectroscopy research of SU-8 photoresist using the femtosecond laser[J]. Optoelectronics Letters, 2018, 14(3): 210

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    Paper Information

    Category: Materials

    Received: Feb. 27, 2017

    Accepted: --

    Published Online: Sep. 15, 2018

    The Author Email: Zhen-hua and WANG (nkwangzh@nankai.edu.cn)

    DOI:10.1007/s11801-017-7043-4

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology