Acta Optica Sinica, Volume. 15, Issue 9, 1258(1995)
Precision Analysis of Phase-Modulation Method for Measuring Stress Birefringence of Optical-Disk Substrate
Polarized phase-modulation method is used to measure small birefringence with high precision. The effects on measuring results caused by some kinds of error sources in this method using PMCSA form for measuring opticaloisk substrate are analyzed. Results ontuined show that the presision is within 0.03 nm.
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[in Chinese], [in Chinese], [in Chinese]. Precision Analysis of Phase-Modulation Method for Measuring Stress Birefringence of Optical-Disk Substrate[J]. Acta Optica Sinica, 1995, 15(9): 1258
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