Optics and Precision Engineering, Volume. 15, Issue 9, 1383(2007)

Structure design and test for guide unloading system of large ultra-precision machine

[in Chinese]... [in Chinese], [in Chinese], [in Chinese] and [in Chinese] |Show fewer author(s)
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    References(2)

    [4] [4] HAHN P O.The 300 mm silicon wafer-A cost and technology challenge[J].Microelectronic Engineering,2001,56(3):3-13.

    [5] [5] STOUTK I,BARRANS S M.The design of aerostatic bearings for application to nanometer resolution manufacturing machine system[J].Tribology International,2000,33:803-809.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Structure design and test for guide unloading system of large ultra-precision machine[J]. Optics and Precision Engineering, 2007, 15(9): 1383

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    Paper Information

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    Received: May. 29, 2007

    Accepted: --

    Published Online: Feb. 18, 2008

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