Chinese Optics Letters, Volume. 18, Issue 5, 051201(2020)

Displacement measurement method based on laser self-mixing interference in the presence of speckle

Yan Zhao1,2 and Haiwei Zhang1,3、*
Author Affiliations
  • 1School of Electrical and Electronic Engineering, Tianjin University of Technology, Tianjin 300384, China
  • 2Tianjin Key Laboratory for Control Theory and Applications in Complicated Systems, Tianjin 300384, China
  • 3Tianjin Key Laboratory of Film Electronic and Communication Device, Tianjin 300384, China
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    Figures & Tables(10)
    Schematic diagram of displacement measurement.
    Schematic diagram of displacement reconstruction: (a) SMI signal; (b) derivative of SMI signal; (c) result of fringe counting method; (d) result of interpolation method.
    SMI experimental system of displacement measurement.
    (a) Experimental SMI signal of PZT vibration; (b) local amplification of experimental SMI signal of PZT vibration.
    EEMD result of the experimental SMI signal.
    Comparison of filtered signals with different IMFs.
    (a) Envelope of filtered SMI signal; (b) normalized SMI signal; (c) reconstructed displacement signal; (d) error of reconstruction displacement.
    (a) Experimental SMI signal of linear displacement table; (b) derivative of experimental SMI signal.
    (a) Envelope of filtered SMI signal; (b) normalized SMI signal; (c) derivative of normalized SMI signal; (d) reconstructed displacement signal; (e) relative error of reconstruction displacement.
    • Table 1. Displacement Reconstruction Results

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      Table 1. Displacement Reconstruction Results

      Maximum Error (nm)Average Error (nm)Standard Deviation (nm)
      Algorithm of Ref. [11]392.9012.93218.60
      Algorithm of this paper388.128.89213.23
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    Yan Zhao, Haiwei Zhang. Displacement measurement method based on laser self-mixing interference in the presence of speckle[J]. Chinese Optics Letters, 2020, 18(5): 051201

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    Paper Information

    Category: Optical Sensing, Measurements, and Metrology

    Received: Feb. 19, 2020

    Accepted: Mar. 20, 2020

    Posted: Mar. 23, 2020

    Published Online: May. 6, 2020

    The Author Email: Haiwei Zhang (zhanghaiwei@email.tjut.edu.cn)

    DOI:10.3788/COL202018.051201

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