Acta Optica Sinica, Volume. 31, Issue 12, 1222003(2011)
Study on Characteristics of Aberrations for an Active Liquid Lens in Lithographic Objective Lens
Get Citation
Copy Citation Text
Yuan Wenquan, Gong Yan. Study on Characteristics of Aberrations for an Active Liquid Lens in Lithographic Objective Lens[J]. Acta Optica Sinica, 2011, 31(12): 1222003
Category: Optical Design and Fabrication
Received: Jun. 13, 2011
Accepted: --
Published Online: Nov. 28, 2011
The Author Email: Wenquan Yuan (yuanwenquan@tom.com)